Influence of Deposition on the Mechanical Property Correlation in Al-O Thin Films with Complex Microstructures by RF Magnetron Sputtering. International Journal of Psychosocial Rehabilitation, [S. l.], v. 23, n. 3, p. 105–116, 2019. DOI: 10.61841/hq588708. Disponível em: http://65.2.176.223/psychosocial/index.php/ijpr/article/view/2047. Acesso em: 27 dec. 2024.